SiSiC Pin Chuck Ring Groove Chuck
Canon, ASML, Nikon, KLA, Bruker ,AMAT..
Metrology Lithography Photography AOI Bonding/Debonding etc
Ultra Precision Semiconductor Application
Global flatness 12 Inch : <1um
Local flatness: <20nm (25x25mm)
Modification, duplication ,recondition
Semiconductor inspection and lithography
www.semixicon.com
#sicpinchuck
SiC pin chuck
SiC groove chuck
SiC ring chuck
