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Ceramic components offer significant advantages over metal and plastic parts when used in etching reactors or wet etching equipment. They retain their full dimensional stability at high temperatures – well above 1000°c. They are extremely good electrical insulators and do not outgas in vacuum.

Ceramics are inert materials and are resistant to many gases, chemicals as well as plasma. Consequently, ceramics are ideal materials for use in wafer processing equipment.

Ceramic components offer significant advantages over metal and plastic parts when used in etching reactors or wet etching equipment. They retain their full dimensional stability at high temperatures – well above 1000°c. They are extremely good electrical insulators and do not outgas in vacuum.


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