0200-03319 0200-02917 0200-23001 0200-23002 AMAT EDGE RING CVD SiC Edge Ring
Material Purity : 99.999703%
Advantages of CVD Silicon Carbide (SiC):
High purity and density – Near-theoretical density, minimal impurities, ideal for demanding environments.
Excellent chemical resistance – Stable in strong acids, bases, and plasma; widely used in semiconductor and corrosive processes.
Superior thermal stability – Maintains strength and structure up to ~1600 °C in inert atmospheres.
High thermal conductivity – Efficient heat dissipation for high-power and high-temperature applications.
Extreme hardness and wear resistance – Protects against erosion, abrasion, and particle impact.
Low thermal expansion – Reduces thermal stress and deformation under rapid temperature changes.
High mechanical strength – Rigid and durable under mechanical or thermal load.
Excellent vacuum compatibility – Low outgassing, suitable for vacuum chambers and optical systems.
Smooth, uniform surface – Ideal for optical coatings, mirrors, and protective layers.
Electrical insulation (or semiconducting, if doped) – Versatile for electronic and structural applications.
