SiSiC Silicon Carbide Pin Chuck Ring Groove Chuck Wafer Chuck Lithographic Photomask Metrology
Canon, ASML, Nikon, KLA, Bruker ,AMAT..
Metrology Lithography Photography AOI Bonding/Debonding etc
Ultra Precision Semiconductor Application
Global flatness 12 Inch : <1um
Local flatness: <20nm (25x25mm)
Modification, duplication ,recondition
Semiconductor Metrology inspection and lithography
