Concave or Convex Shape SiSiC Pin Chuck
Specially designed SiSiC Pin Chuck for Warpage Wafer ,Concave or Convex
Calculated Wafer Pin Diameter, Pin Pitch and Layout
Ring and holes treatment
Concave and Convex compensation
300nm Flatness through global 300mm
30nm Flatness through local 30X30mm
450mm process ready
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