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12-28-2020

Semixicon WIT-H240-01 Thermal Porous Vacuum Wafer Chuck Table

Semixicon WIT-H240-01 Thermal Porous Vacuum Wafer Chuck Table Key Specification

Material: Stainless Steel 

Adsorption area = heated area : 240*240mm

Top surface planarity: 10um max. @ room temp.

Pressure: -0.7Bar to 6.0Bar 

Power requirement: maximum 80A @ 220VAC (1.8kw) 

Max temp. 200°C ±2.0%) 

Working temp. 180°C ±1.5%) 

Temp stability: 0.5°C Heating rate: 10°C /min

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