Home > News > Ceramic Pin Chuck For Wafer Handling


Ceramic Pin Chuck For Wafer Handling

Ceramic Wafer Chucks are evolving from grooves to pins for smaller contacting area,less partical contamination and improving warpage rectification.

Semixicon is developing highly precisive SiC/SSiC etc pin chucks for wafer exposure ,inspection,transportation etc process,those chucks are highly flexible,outstandingly flat and extremely tolerant to harsh working environment .

SSiC and SiSiC Wafer Chuck.jpg

Copyright © Semixicon LLC All Rights Reserved.